He-3 targets are a valuable tool in nuclear physics, particularly for studying nuclear structure and dynamics via direct reactions in inverse kinematics. However, they are often prone to degradation under intense beam irradiation and have insufficient He-3 content for use with lowintensity exotic beams. In a recent AGATA experiment at LNL, designed to study the astrophysically relevant lifetime of a O-15 excited state, two types of He-3 targets were tested. One was produced using ion implantation and the other with a novel magnetron sputtering technique, in both cases on Au substrates. Following irradiation with a stable O-16 beam, they were characterized using Nuclear Reaction Analysis (NRA) and Elastic Recoil Detection Analysis (ERDA). Results demonstrated that, under the here used fabrication conditions, sputtered targets present a higher He-3 content, while implanted ones exhibit thinner profiles. This highlights the possibilities and complementarity of these targets, suggesting their tailored use for future experimental campaigns.