DC magnetron sputter deposition in pure helium gas: formation of porous films or gas/solid nanocomposite coatings

Magnetron sputtering of two materials (Aluminum and Silicon) was performed in He gas and led to the formation of very different porous thin films: a fiberform nanostructure or a gas/solid nanocomposite. The composition of the thin films obtained was analyzed by means of ion beam techniques: Rutherford backscattering and proton elastic backscattering spectroscopies to measure…

Structure and microstructure of EB-PVD yttria thin films grown on Si (111) substrate

Structure and microstructure of yttria thin films grown by electron beam physical vapour deposition on a stationary Si (111) substrate at room temperature (RT), 500 degrees and 700 degrees C, were investigated by the grazing-incidence X-ray diffraction and scanning electron microscopy, respectively. X-ray photoelectron spectroscopy provided information on the surface contamination from the atmosphere and…