Design and Characterization of ITO-Covered Resonant Nanopillars for Dual Optical and Electrochemical Sensing

In this work we present a dual optical and electrochemical sensor based on SiO2/Si3N4 resonant nanopillars covered with an indium tin oxide (ITO) thin film. A 25-30 nm thick ITO layer deposited by magnetron sputtering acts as an electrode when incorporated onto the nanostructured array, without compromising the optical sensing capability of the nanopillars. Bulk…