Harnessing a Vibroacoustic Mode for Enabling Smart Functions on Surface Acoustic Wave Devices – Application to Icing Monitoring and Deicing

Microacoustic wave devices are essential components in the radio frequency (RF) electronics and microelectromechanical systems (MEMS) industry with increasing impact in various sensing and actuation applications. Reliable and smart operation of acoustic wave devices at low costs will cause a crucial advancement. Herein, this study presents the enablement of temperature and mechanical sensing capabilities in…