Plasma Enabled Conformal and Damage Free Encapsulation of Fragile Molecular Matter: from Surface-Supported to On-Device Nanostructures

Damage-free encapsulation of molecular structures with functional nanolayers is crucial to protect nanodevices from environmental exposure. With nanoscale electronic, optoelectronic, photonic, sensing, and other nanodevices based on atomically thin and fragile organic matter shrinking in size, it becomes increasingly challenging to develop nanoencapsulation that is simultaneously conformal at atomic scale and does not damage fragile…