{"id":29362,"date":"2009-03-31T23:37:59","date_gmt":"2009-03-31T21:37:59","guid":{"rendered":"https:\/\/icmsva.vallealto.es\/?articulos_sci=surface-nanostructuring-of-tio2-thin-films-by-ion-beam-irradiation"},"modified":"2026-04-14T11:50:45","modified_gmt":"2026-04-14T09:50:45","slug":"surface-nanostructuring-of-tio2-thin-films-by-ion-beam-irradiation","status":"publish","type":"articulos_sci","link":"https:\/\/icmsva.vallealto.es\/?articulos_sci=surface-nanostructuring-of-tio2-thin-films-by-ion-beam-irradiation","title":{"rendered":"Surface nanostructuring of TiO2 thin films by ion beam irradiation"},"content":{"rendered":"<figure><img decoding=\"async\" src=\"https:\/\/icmsva.vallealto.es\/wp-content\/uploads\/2009\/03\/Surface-nanostructuring-of-TiO2-thin-films-by-ion-1.jpg\" alt=\"Surface nanostructuring of TiO2 thin films by ion beam irradiation\" \/><\/figure>\n<p>This work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. Irradiation with N+ ions leads to the formation of a layer with voids at a depth similar to the ion-projected range. By setting the ion-projected range a few tens of nanometers below the surface of the film, well-ordered nanorods appear aligned with the angle of incidence of the ion beam. Slightly different results were obtained by using heavier (S+) and lighter (B+) ions under similar conditions.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>This work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. Irradiation with N+ ions leads to the formation of a layer with voids at a depth similar to the ion-projected range. By setting the ion-projected range a few tens of&hellip;<\/p>\n","protected":false},"featured_media":29366,"template":"","autores":[],"grupos_de_investigacion":[142],"revistas":[1869],"anos":[896],"class_list":["post-29362","articulos_sci","type-articulos_sci","status-publish","has-post-thumbnail","hentry","grupos_de_investigacion-nanotecnologia-en-superficies-y-plasma","revistas-scripta-materialia","anos-896","description-off"],"acf":[],"_links":{"self":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/29362","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci"}],"about":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/types\/articulos_sci"}],"version-history":[{"count":1,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/29362\/revisions"}],"predecessor-version":[{"id":29367,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/29362\/revisions\/29367"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/media\/29366"}],"wp:attachment":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=29362"}],"wp:term":[{"taxonomy":"autores","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fautores&post=29362"},{"taxonomy":"grupos_de_investigacion","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fgrupos_de_investigacion&post=29362"},{"taxonomy":"revistas","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Frevistas&post=29362"},{"taxonomy":"anos","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fanos&post=29362"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}