{"id":28432,"date":"2012-03-01T23:40:47","date_gmt":"2012-03-01T22:40:47","guid":{"rendered":"https:\/\/icmsva.vallealto.es\/?articulos_sci=quantification-of-low-levels-of-fluorine-content-in-thin-films"},"modified":"2026-04-14T11:49:20","modified_gmt":"2026-04-14T09:49:20","slug":"quantification-of-low-levels-of-fluorine-content-in-thin-films","status":"publish","type":"articulos_sci","link":"https:\/\/icmsva.vallealto.es\/?articulos_sci=quantification-of-low-levels-of-fluorine-content-in-thin-films","title":{"rendered":"Quantification of low levels of fluorine content in thin films"},"content":{"rendered":"<figure><img decoding=\"async\" src=\"https:\/\/icmsva.vallealto.es\/wp-content\/uploads\/2012\/03\/Quantification-of-low-levels-of-fluorine-content-i-1.png\" alt=\"Quantification of low levels of fluorine content in thin films\" \/><\/figure>\n<p>Fluorine quantification in thin film samples containing different amounts of fluorine atoms was accomplished by combining proton-Rutherford Backscattering Spectrometry (p-RBS) and proton induced gamma-ray emission (PIGE) using proton beams of 1550 and 2330 keV for p-RBS and PIGE measurements, respectively. The capabilities of the proposed quantification method are illustrated with examples of the analysis of a series of samples of fluorine-doped tin oxides, fluorinated silica, and fluorinated diamond-like carbon films. It is shown that this procedure allows the quantification of F contents as low as 1 at.% in thin films with thicknesses in the 100-400 nm range.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Fluorine quantification in thin film samples containing different amounts of fluorine atoms was accomplished by combining proton-Rutherford Backscattering Spectrometry (p-RBS) and proton induced gamma-ray emission (PIGE) using proton beams of 1550 and 2330 keV for p-RBS and PIGE measurements, respectively. The capabilities of the proposed quantification method are illustrated with examples of the analysis of&hellip;<\/p>\n","protected":false},"featured_media":28435,"template":"","autores":[],"grupos_de_investigacion":[142],"revistas":[5258],"anos":[893],"class_list":["post-28432","articulos_sci","type-articulos_sci","status-publish","has-post-thumbnail","hentry","grupos_de_investigacion-nanotecnologia-en-superficies-y-plasma","revistas-nuclear-instruments-methods-in-physics-research-section-b-beam-interactions-with-materials-and-atoms","anos-893","description-off"],"acf":[],"_links":{"self":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/28432","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci"}],"about":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/types\/articulos_sci"}],"version-history":[{"count":1,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/28432\/revisions"}],"predecessor-version":[{"id":28436,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/28432\/revisions\/28436"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/media\/28435"}],"wp:attachment":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=28432"}],"wp:term":[{"taxonomy":"autores","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fautores&post=28432"},{"taxonomy":"grupos_de_investigacion","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fgrupos_de_investigacion&post=28432"},{"taxonomy":"revistas","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Frevistas&post=28432"},{"taxonomy":"anos","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fanos&post=28432"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}