{"id":28263,"date":"2012-08-31T23:47:46","date_gmt":"2012-08-31T21:47:46","guid":{"rendered":"https:\/\/icmsva.vallealto.es\/?articulos_sci=critical-thickness-and-nanoporosity-of-tio2-optical-thin-films"},"modified":"2026-04-14T11:49:06","modified_gmt":"2026-04-14T09:49:06","slug":"critical-thickness-and-nanoporosity-of-tio2-optical-thin-films","status":"publish","type":"articulos_sci","link":"https:\/\/icmsva.vallealto.es\/?articulos_sci=critical-thickness-and-nanoporosity-of-tio2-optical-thin-films","title":{"rendered":"Critical thickness and nanoporosity of TiO2 optical thin films"},"content":{"rendered":"<figure><img decoding=\"async\" src=\"https:\/\/icmsva.vallealto.es\/wp-content\/uploads\/2012\/08\/Critical-thickness-and-nanoporosity-of-TiO2-optica-1.png\" alt=\"Critical thickness and nanoporosity of TiO2 optical thin films\" \/><\/figure>\n<p>This work reports on the porosity and refraction index of TiO2 thin films as a function of the film thickness. Samples were fabricated by plasma enhanced chemical vapor deposition (PECVD) in a microwave electron cyclotron resonance (MW-ECR) reactor at room temperature using titanium tetra-isopropoxide (MP) as precursor. Experimental parameters such as plasma gas composition (pure oxygen and argon\/oxygen mixtures) and pressure (either ECR conditions or \u00abnormal\u00bb pressure, i.e. 10(-4) or 10(-3) torrs correspondently) were varied. The evolution of the thin film microstructure, porosity and optical properties is critically studied by AFM, SEM, water adsorption isotherms, ellipsometry and UV-Vis transmittance and the existence of a certain critical thickness (t(c)) demonstrated. The porosity of the films with thicknesses ranging from several tens of nanometers up to half a micrometer is evaluated by QCM-isotherms at room temperature. The dependency of this critical thickness with the plasma conditions is evaluated experimental and theoretically. Thus, the microstructure change at t(c) is attributed to a transition from a surface diffused dominated growth mechanism for t &lt; t(c) to another where shadowing is predominant. Dynamic scaling analysis of the two regimes and their Monte Carlo simulation complete the reported study.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>This work reports on the porosity and refraction index of TiO2 thin films as a function of the film thickness. Samples were fabricated by plasma enhanced chemical vapor deposition (PECVD) in a microwave electron cyclotron resonance (MW-ECR) reactor at room temperature using titanium tetra-isopropoxide (MP) as precursor. Experimental parameters such as plasma gas composition (pure&hellip;<\/p>\n","protected":false},"featured_media":28265,"template":"","autores":[],"grupos_de_investigacion":[142],"revistas":[3664],"anos":[893],"class_list":["post-28263","articulos_sci","type-articulos_sci","status-publish","has-post-thumbnail","hentry","grupos_de_investigacion-nanotecnologia-en-superficies-y-plasma","revistas-microscopy-and-microanalysis","anos-893","description-off"],"acf":[],"_links":{"self":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/28263","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci"}],"about":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/types\/articulos_sci"}],"version-history":[{"count":1,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/28263\/revisions"}],"predecessor-version":[{"id":28267,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/articulos_sci\/28263\/revisions\/28267"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=\/wp\/v2\/media\/28265"}],"wp:attachment":[{"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=28263"}],"wp:term":[{"taxonomy":"autores","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fautores&post=28263"},{"taxonomy":"grupos_de_investigacion","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fgrupos_de_investigacion&post=28263"},{"taxonomy":"revistas","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Frevistas&post=28263"},{"taxonomy":"anos","embeddable":true,"href":"https:\/\/icmsva.vallealto.es\/index.php?rest_route=%2Fwp%2Fv2%2Fanos&post=28263"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}