The complete range of Ti5Si3–Ti5Ge3 solid solutions was synthesised from elemental mixtures of Ti, Si, and Ge under an inert atmosphere via mechanically induced self-sustaining reactions (MSR). The stoichiometry of Ti5Si3−xGex solid solutions was controlled by adjusting the Si/Ge ratio of the initial mixture. The chemical composition and lattice parameters of the materials confirmed that Ti5Si3–Ti5Ge3 solid solutions with good chemical homogeneity could be produced via MSR.